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FMS-EM是一个紧凑型的力测量装置安装在操作设备MM3A-EM上，它可以实现力学测量和纳米压痕。
| FMT 400 传感器 | |||
|
Tip Force Constant(Calculation) 探针力常数（计算） |
2-4N/m | ||
|
Maximum Tip Force最大探针力 (This value is calculated with assumptive deflection Of 10% and an average of force constant) |
80 µN | ||
| Sensor Resistance传感器电阻 | 500-650Ω | ||
|
Sensor Sensitivity传感器灵敏度 (This value depends on bias voltage Vbridge that is Applied to series resistence of sensor and reference |
3.1 x 10-3 mV/nm at Vbridge=2.5V | ||
| Length探针长度 | 400µm | ||
| Width探针宽度 | 50µm | ||
| Height探针高度 | 4-5µm | ||
| Tip Radius针尖半径 | <20nm | ||
| Tip Height针尖高度 | >5µm | ||
| FMT 120 传感器 | |||
|
Tip Force Constant(Calculation) 探针力常数（计算） |
30-40N/m | ||
|
Maximum Tip Force最大探针力 (This value is calculated with assumptive deflection Of 10% and an average of force constant) |
360µN | ||
| Sensor Resistance传感器电阻 | 500-650Ω | ||
|
Sensor Sensitivity传感器灵敏度 (This value depends on bias voltage Vbridge that is Applied to series resistence of sensor and reference |
18.8 x 10-3 mV/nm at Vbridge=2.5V | ||
| Length探针长度 | 120µm | ||
| Width探针宽度 | 50µm | ||
| Height探针高度 | 4-5µm | ||
| Tip Radius针尖半径 | <20nm | ||
| Tip Height针尖高度 | >5µm |
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